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Silver oxide decomposition mediated direct bonding of silicon-based materials.

Tomoki MatsudaKota InamiKeita MotoyamaTomokazu SanoAkio Hirose
Published in: Scientific reports (2018)
Silicon-based materials are widely promising electronic components by the combination with metals in power electronics field. However, bonding metal and silicon-based materials generally requires specific surface modification due to their different chemical bonds. Here, we demonstrate a process for directly bonding metals to silicon-based materials that does not require surface treatment, based on the in situ decomposition of Ag2O paste, forming Ag nanoparticles (AgNPs). We demonstrate sound joints of Ag/silicon-based materials at 300-500 °C with the formation of a silicon oxide interlayer containing AgNPs. We propose that Ag in the interlayer attracted other Ag particles to the interface, playing a unique role in this direct bonding process. This process is suitable for various bonding applications in electronics, as well the fabrication of conducting paths for photovoltaic and other applications.
Keyphrases
  • quantum dots
  • highly efficient
  • visible light
  • silver nanoparticles
  • human health
  • risk assessment
  • climate change
  • health risk assessment
  • high resolution
  • drinking water
  • liquid chromatography
  • simultaneous determination