Effect of Water Adsorption Layers on the Friction Properties of Fluorinated Amorphous Carbon Films in Ambient Air.

Fluorinated amorphous carbon (a-C:F) films with different microstructures were prepared with bipolar-type plasma-based ion implantation and deposition method by changing the negative bias voltage, and the tribological properties were investigated in ambient air. Their surface chemistry and water adsorption properties were investigated to determine their friction properties. Microstructural analysis results showed that, as the negative bias voltage increased, the density of the films decreased with the promotion of graphitization. The water adsorption properties evaluated using a quartz crystal microbalance showed that a large adsorbed water weight was observed for the films deposited at high negative bias voltages. In contrast, these films exhibited thin water adsorption layers from the measurements with an ellipsometer. These results indicate that water molecules are adsorbed on the film surface and permeate into the films, particularly for the films deposited at high negative bias voltages. The friction properties in ambient air depend significantly on their microstructure and relative humidity (RH). Regardless of the RH, the higher the negative bias voltage during film deposition, the lower the friction coefficient. Since several water molecules existed on the surface of the film deposited with a low negative bias voltage, its surface was oxidized during sliding, which increased the friction coefficient. In addition, the friction coefficient of the films increased at high RH. The number of water molecules adsorbed on the film increased as the RH increased, causing a high shear force owing to many hydrogen bonds and/or high capillary force at the friction interface.