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Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays.

Peng LiuEr-Xiong DingZhenyu XuXiaoqi CuiMingde DuWeijun ZengAnastasios KarakassidesJin ZhangQiang ZhangFaisal AhmedHua JiangPertti HakonenHarri LipsanenZhipei SunEsko I Kauppinen
Published in: ACS nano (2024)
With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT photodetector arrays showcase excellent uniformity, wearability, environmental stability, and notable broadband photoresponse, boasting a high responsivity of 44 AW -1 and a simultaneous detectivity of 1.9 × 10 9 Jones. This research provides an efficient, versatile, and scalable strategy for manufacturing wearable all-CNT device arrays, allowing widespread adoption in wearable optoelectronics and multifunctional sensors.
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