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Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices.

David HochKevin-Jeremy HaasLeopold MollerTimo SommerPedro SoubeletJonathan J FinleyMenno Poot
Published in: Micromachines (2021)
Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.
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