Jang-Jae Lee (Jangjae Lee)

Publication Activity (10 Years)

Years Active: 2021-2022
Publications (10 Years): 9

Top Topics

Mass Spectrometry

Top Venues

Sensors (Basel, Switzerland)

Nanomaterials (Basel, Switzerland)

Materials (Basel, Switzerland)

This page only lists publications with an associated author ORCID identifier.

Publications

Young-Seok Lee, Si-Jun Kim, Jang-Jae Lee, Chul-Hee Cho, In-Ho Seong, Shinjae You
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO 2 . Sensors (Basel, Switzerland) 22 (16) (2022)
Si-Jun Kim, Jang-Jae Lee, Young-Seok Lee, Chul-Hee Cho, Shin-Jae You
Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe. Sensors (Basel, Switzerland) 22 (3) (2022)
Si-Jun Kim, In-Ho Seong, Young-Seok Lee, Chul-Hee Cho, Won-Nyoung Jeong, Ye-Bin You, Jang-Jae Lee, Shin-Jae You
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation. Sensors (Basel, Switzerland) 22 (15) (2022)
Si-Jun Kim, Sang-Ho Lee, Ye-Bin You, Young-Seok Lee, In-Ho Seong, Chul-Hee Cho, Jang-Jae Lee, Shin-Jae You
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors (Basel, Switzerland) 22 (15) (2022)
In-Ho Seong, Si-Jun Kim, Young-Seok Lee, Chul-Hee Cho, Jang-Jae Lee, Wonnyoung Jeong, Yebin You, Shin-Jae You
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath. Sensors (Basel, Switzerland) 22 (16) (2022)
Young-Seok Lee, Heejung Yeom, Daehan Choi, Si-Jun Kim, Jang-Jae Lee, Junghyung Kim, Hyo-Chang Lee, ShinJae You
Database Development of SiO 2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe. Nanomaterials (Basel, Switzerland) 12 (21) (2022)
In-Ho Seong, Jinho Lee, Si-Jun Kim, Young-Seok Lee, Chul-Hee Cho, Jang-Jae Lee, Wonnyoung Jeong, Yebin You, Shin-Jae You
Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma. Nanomaterials (Basel, Switzerland) 12 (22) (2022)
Chul-Hee Cho, Sijun Kim, Young-Seok Lee, Wonnyoung Jeong, In-Ho Seong, Jang-Jae Lee, Minsu Choi, Yebin You, Sangho Lee, Jinho Lee, Shinjae You
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma. Sensors (Basel, Switzerland) 22 (17) (2022)
Chulhee Cho, Kwangho You, Sijun Kim, Youngseok Lee, Jang-Jae Lee, Shinjae You
Characterization of SiO2 Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas. Materials (Basel, Switzerland) 14 (17) (2021)