Total Internal Reflection Peak Force Infrared Microscopy.

Total internal reflection (TIR) infrared spectroscopy is a convenient measurement tool for collecting spectra for chemical identification. However, TIR infrared microscopy lacks high spatial resolution due to the optical diffraction limit and difficulty to preserve a high-quality wave front for focus. In this article, we present the peak force infrared microscopy in the TIR geometry to achieve a 10 nm spatial resolution. Instead of optical detection, photothermal responses of the sample are collected in the peak force tapping mode of atomic force microscopy. We demonstrate the technique on two representative samples: structured polymers for soft matters and a hexagonal boron nitride flake for two-dimensional materials. As an extension of the apparatus, we also demonstrate nanoinfrared imaging with the TIR excitation for photoinduced force microscopy. The combination of TIR geometry with nanoinfrared microscopies simplifies the optical alignment, providing alternative instrument-designing principles for atomic force microscopy-based infrared microscopy.