Alfredo Mameli (A Mameli)

ORCID

Publication Activity (10 Years)

Years Active: 2017-2024
Publications (10 Years): 8

Top Venues

ACS applied materials & interfaces

The journal of physical chemistry. C, Nanomaterials and interfaces

Advanced materials (Deerfield Beach, Fla.)

Accounts of chemical research

Holst Centre

This page only lists publications with an associated author ORCID identifier.

Affiliation History

Holst Centre Jun 18 2018

Netherlands

Research Scientist

Publications

Alfredo Mameli, Kanda Tapily, Jie Shen, Fred Roozeboom, Mengcheng Lu, David O'Meara, Scott P Semproni, Jiun-Ruey Chen, Robert Clark, Gert Leusink, Scott Clendenning
Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO 2 and TiON on SiN vs SiO 2 . ACS applied materials & interfaces (2024)
Alfredo Mameli, Kanda Tapily, Jie Shen, Fred Roozeboom, Mengcheng Lu, David O'Meara, Scott P Semproni, Jiun-Ruey Chen, Robert Clark, Gert Leusink, Scott Clendenning
Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO 2 and TiON on SiN vs SiO 2 . ACS applied materials & interfaces 16 (11) (2024)
Alfredo Mameli, Andrew V Teplyakov
Selection Criteria for Small-Molecule Inhibitors in Area-Selective Atomic Layer Deposition: Fundamental Surface Chemistry Considerations. Accounts of chemical research (2023)
Bora Karasulu, Fred Roozeboom, Alfredo Mameli
High-Throughput Area-selective Spatial Atomic Layer Deposition of SiO 2 with Interleaved Small Molecule Inhibitors and Integrated Back-Etch Correction for Low Defectivity. Advanced materials (Deerfield Beach, Fla.) (2023)
Marc J M Merkx, Athanasios Angelidis, Alfredo Mameli, Jun Li, Paul C Lemaire, Kashish Sharma, Dennis M Hausmann, Wilhelmus Erwin M M Kessels, Tania E Sandoval, Adriaan J M Mackus
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors. The journal of physical chemistry. C, Nanomaterials and interfaces 126 (10) (2022)
M A Mione, Vincent Vandalon, Alfredo Mameli, Wilhelmus Erwin M M Kessels, F Roozeboom
Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy. The journal of physical chemistry. C, Nanomaterials and interfaces 125 (45) (2021)
Alfredo Mameli, M A Verheijen, Adriaan J M Mackus, Wilhelmus Erwin M M Kessels, F Roozeboom
Isotropic Atomic Layer Etching of ZnO Using Acetylacetone and O2 Plasma. ACS applied materials & interfaces 10 (44) (2018)
Alfredo Mameli, Marc J M Merkx, Bora Karasulu, Fred Roozeboom, Wilhelmus Erwin M M Kessels, Adriaan J M Mackus
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle. ACS nano 11 (9) (2017)

Alfredo Mameli.css-eqlu8i{font-size:small;padding-left:4px;} (A Mameli)

Publication Activity (10 Years)

Top Topics

Top Venues

Alfredo Mameli (A Mameli)