Karsten Arts

Publication Activity (10 Years)

Years Active: 2021-2022
Publications (10 Years): 3

Top Topics

Room Temperature

Machine Learning

Top Venues

Physical chemistry chemical physics : PCCP

The journal of physical chemistry. C, Nanomaterials and interfaces

Chemistry of materials : a publication of the American Chemical Society

This page only lists publications with an associated author ORCID identifier.

Publications

Jihong Yim, Emma Verkama, Jorge A Velasco, Karsten Arts, Riikka L Puurunen
Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile. Physical chemistry chemical physics : PCCP 24 (15) (2022)
Karsten Arts, Harvey Thepass, Marcel A Verheijen, Riikka L Puurunen, Wilhelmus Erwin M M Kessels, Harm C M Knoops
Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2. Chemistry of materials : a publication of the American Chemical Society 33 (13) (2021)
Karsten Arts, Sanne Deijkers, Riikka L Puurunen, Wilhelmus Erwin M M Kessels, Harm C M Knoops
Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2. The journal of physical chemistry. C, Nanomaterials and interfaces 125 (15) (2021)